TKF调压阀S8RG2-VF-3A3-P技术参数
Material | S = 316L Stainless steel |
Connection Size | 8 = 1/2" |
Product | RG2 = RG2 Series |
Connection Type | VF = Female Type Face Seal |
Maximum Inlet Pressure | 3 = 600 PSIG |
Gauge Port Configuration | A = No Gauge Port (Fig. A) |
Outlet Pressure Range | 3 = 1 ~ 150 PSIG |
User Option | BLANK = Standard |
Grade | P = Electropolishing (5 Ra µinch) |
TKF调压阀RG2系列介绍
• 专为使用点高流量而设计,用于气体公司、设备制造商和半导体制造商的工艺气体柜。
• RG2 可精确控制工具处或附近的工艺气体压力,在 300 PSIG 入口处流速高达 600 SLPM。
• 所有内部表面均采用 10Ra 或 5Ra 处理,以确保最少的颗粒产生和滞留。金属对金属隔膜密封件可增强防漏完整性。
• 组装、焊接、测试和最终清洁的每个步骤均在 100 级洁净室中完成。
• Designed for point-of-use high flow to be used in process gas cabinets for gas companies, equipment manufactures and semiconductor manufacturers.
• The RG2 provides precise control of process gas pressure at or near the tool for flow rates of up to 600 SLPM at 300 PSIG inlet.
• All internal surfaces are finished with 10Ra or 5Ra to ensure minimal particle generation and entrapment. Metal-to-metal diaphragm seals provide enhanced leak tight integrity.
• Every step of assembly, welding, testing and final cleaning finished in Class 100 Cleanrooms.
TKF调压阀RG2系列选型
TKF调压阀RG2系列其他常用型号:
TKF S8RG2-SW-1A0
TKF S8RG2-SW-1A0-P
TKF S8RG2-SW-180
TKF S8RG2-SW-1B0-P
TKF S8RG2-SW-1CO
TKF S8RG2-SW-1C0-P
TKF S8RG2-VF-1A0
TKF S8RG2-VF-1A0-P
TKF S8RG2-VF-180
TKF S8RG2-VF-1B0-P
TKF S8RG2-VF-1CO
TKF S8RG2-VF-ICO-P
TKF S8RG2-VM-1A0
TKF S8RG2-VM-1A0-P
TKF S8RG2-VM-180
TKF S8RG2-VM-1B0-P
TKF S8RG2-VF-3A3-P
TKF REGULATORS NEW + ORIGINAL+ ONE YEAR WARRANTY
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TKF调压阀RG2系列S8RG2-VF-3A3-P技术参数及选型