PPE密封214-G67P产品介绍
描述
一种半透明米色化合物，具有半结晶的全氟聚合物纳米填料，专门为满足半导体和生物分析行业的需求而开发。与基于氟的化学物兼容，普遍适用于包括光刻、等离子体、PVD、CVD、蚀刻、剥离和清洗在内的湿法和干法半导体工艺。
Perlast® G67P结合了全氟化聚合物骨架、全氟化纳米填料系统（无无机填料）和高度氟化的交联工艺，从而形成了具有无与伦比纯度和化学耐受性的全氟弹性体。
Perlast® G67P的压缩模量显著低于传统的全氟弹性体，使其具有高度的柔顺性。因此，在给定的压缩下，它表现出低反应力，这导致对密封件的应力较小，从而延长了使用寿命。
关键属性
极其纯净 - 不含可能导致颗粒化问题的无机填料。
优异的化学和温度耐受性。
优异的机械性能。
极低的放气特性，使其非常适合真空密封应用。
高密封效率。
高材料柔顺性，减少表面渗透。
降低的首片效应。
降低总体拥有成本。
典型应用
动态密封 - 闸阀、门密封、摆动阀、ISO阀、粘接门和唇形密封。
静态密封 - O形圈、主体密封、腔室盖密封、阴极组件密封、静电卡盘密封和法兰配件。
晶圆处理产品 - 末端执行器垫和真空吸盘
适用于：
湿法和干法半导体工艺，包括：
光刻
PVD
CVD
蚀刻
剥离
清洗
激光/光学设备
此系列中的其他材料
Perlast G74P（超纯半透明）
Perlast G75H（超纯白色）
Description
A translucent beige compound with semi-crystalline perfluoropolymer nano-filler, specially developed to meet the demands of the semiconductor and bio-analytical industries. Compatible with fluorine based chemistries and universally suitable for both wet and dry semiconductor processes including Lithography, Plasma, PVD, CVD, Etch, Stripping and Cleaning.
Perlast® G67P combines a fully fluorinated polymer backbone, a fully fluorinated nano-filler system (no inorganic fillers) and a highly fluorinated cross-linking process, which results in a perfluoroelastomer with unrivalled purity and chemical resistance.
Perlast® G67P has a significantly lower compressive modulus than traditional perfluoroelastomers, making it highly compliant. So for a given compression, it exhibits a low reaction force, this results in lower stress on the seal, which leads to longer life expectancy.
Key Attributes
Exceptionally pure - does not contain any inorganic fillers which may cause particulation problems.
Excellent chemical and temperature resistance.
Excellent mechanical properties.
Extremely low out-gassing properties making it ideal for Vacuum sealing applications.
High sealing efficiency.
High material compliance reduces surface permeation.
Reduced first wafer effect.
Lower cost of ownership.
Typical Applications
Dynamic seals - gate valves, door seals, pendulum valves, ISO valves, bonded gates and lip seals.
Static seals - O-rings, body seals, chamber lid seals, cathode Assembly seals, electro-static-chuck seals and flange fittings.
Wafer-handling products – end effector pads & vacuum suction pads
Suitable for use in:
Wet and dry semiconductor processes including:-
- Lithography
- PVD
- CVD
- Etch
- Stripping
- Cleaning
Laser/optical equipment
Other materials in this range
Perlast G74P (ultra-pure translucent)
Perlast G75H (ultra-pure white)
PPE配件其他常用型号：
PPE 214-G67P
PPE SEAL NEW + ORIGINAL+ ONE YEAR WARRANTY
爱泽工业成立于2010年，定位于向制造工业提供高端制造技术和设备。代理经营世界优质的电气自动化、机械与传动、流体控制、仪器仪表、工具等产品。作为电气，液压以及气动解决方案的合作伙伴，我们利用我们的全球协作团队，为客户提供先进解决方案，市场知识以及相关增值服务来帮助优化客户的工作效率，提高可靠性和安全性，致力于成为工业产品和解决方案的优质渠道。
如果有任何关于PPE密封214-G67P的疑问，请随时与我们沟通（021-31006702）。我们将尽全力解决您的问题。
If you have any question for PPE products, please feel free to dial 0086-21-3100 6702/ send request email to sales@ize-industries.com / browse our website:www.ize-industries.com.
PPE密封214-G67P介绍
